ENGLISH

Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

By Xiao-Sheng Zhang (auth.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
2016
ISBN
978-3-662-48814-0, 978-3-662-48816-4
DOI
10.1007/978-3-662-48816-4
Language
english
Format
PDF
Filesize
9 MB (9320912 bytes)
Series
Springer Theses
Edition
1
Pages
XX, 122\137
Time added
2016-03-14 21:35:01
Instrumentation; NanotechnologyNanotechnology and Microengineering; Microengineer

Description

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

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