ENGLISH

Modelling of Microfabrication Systems

By Prof. Raja Nassar , Prof. Weizhong Dai (auth.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
2003
ISBN
978-3-642-05536-2, 978-3-662-08792-3
DOI
10.1007/978-3-662-08792-3
Language
english
Format
PDF
Filesize
5 MB (5537665 bytes)
Series
Microtechnology and MEMS
Edition
1
Pages
270\275
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Instrumentation; NanotechnologyNanotechnology and Microengineering; Simulation an

Description

This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

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