ENGLISH

Optical Lithography: Here is Why

Book information

Publisher
SPIE Press
Year
2010
ISBN
0819475602, 978-0-8194-7560-2
Language
english
Format
PDF
Filesize
31 MB (32351885 bytes)
Series
SPIE Press Monograph Vol. PM190
Pages
492\473
Time added
2014-02-12 18:00:00

Description

This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get a primer on the outlook of optical lithography and the many next-generation technologies that may greatly enhance semiconductor manufacturing in the near future. Topics include:- Exposure Systems- Image Formation- The Meter of Lithography- Components in Optical Lithography- Processing and Optimization- Immersion Lithography- Outlook for optical lithography

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