ENGLISH

Handbook of Multilevel Metallization for Integrated Circuits - Materials, Technology, and Applications

By Wilson , S.R.; Tracy , C.J.; Freeman , J.L. , Jr.(eds.)

Book information

Publisher
William Andrew Publishing/Noyes
Year
1993
ISBN
978-0-8155-1761-0, 978-0-8155-1340-7
Language
english
Format
PDF
Filesize
19 MB (20037181 bytes)
Pages
887\350
Orientation
yes
Scanned
landscape
Time added
2013-08-14 18:00:00
Приборостроение;Полупроводниковые приборы;Интеграл

Description

This book answers an important need by pulling together in one volume a thorough technical summary of each of the key areas that make up a multilevel metal system. Included are associated design, analysis, materials, and manufacturing topics. It functions as a good learning tool for the engineer newly assigned to work in metallization. It also serves as a reference text for any MLM engineer, new or experienced, who wishes to refresh their memory. For someone who wants to further specialize in one topical area, an extensive listing of references has been provided.

Similar books