Electrical Atomic Force Microscopy for Nanoelectronics

Description

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible. Front Matter ....Pages i-xx The Atomic Force Microscopy for Nanoelectronics (Umberto Celano)....Pages 1-28 Conductive AFM for Nanoscale Analysis of High-k Dielectric Metal Oxides (Christian Rodenbücher, Marcin Wojtyniak, Kristof Szot)....Pages 29-70 Mapping Conductance and Carrier Distributions in Confined Three-Dimensional Transistor Structures (Andreas Schulze, Pierre Eyben, Jay Mody, Kristof Paredis, Lennaert Wouters, Umberto Celano et al.)....Pages 71-106 Scanning Capacitance Microscopy for Two-Dimensional Carrier Profiling of Semiconductor Devices (Jay Mody, Jochonia Nxumalo)....Pages 107-142 Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices (Yu Kyoung Ryu, Armin Wolfgang Knoll)....Pages 143-172 Characterizing Ferroelectricity with an Atomic Force Microscopy: An All-Around Technique (Simon Martin, Brice Gautier, Nicolas Baboux, Alexei Gruverman, Adrian Carretero-Genevrier, Martí Gich et al.)....Pages 173-203 Electrical AFM for the Analysis of Resistive Switching (Stefano Brivio, Jacopo Frascaroli, Min Hwan Lee)....Pages 205-229 Magnetic Force Microscopy for Magnetic Recording and Devices (Atsufumi Hirohata, Marjan Samiepour, Marco Corbetta)....Pages 231-265 Space Charge at Nanoscale: Probing Injection and Dynamic Phenomena Under Dark/Light Configurations by Using KPFM and C-AFM (Christina Villeneuve-Faure, Kremena Makasheva, Laurent Boudou, Gilbert Teyssedre)....Pages 267-301 Conductive AFM of 2D Materials and Heterostructures for Nanoelectronics (Filippo Giannazzo, Giuseppe Greco, Fabrizio Roccaforte, Chandreswar Mahata, Mario Lanza)....Pages 303-350 Diamond Probes Technology (Thomas Hantschel, Thierry Conard, Jason Kilpatrick, Graham Cross)....Pages 351-384 Scanning Microwave Impedance Microscopy (sMIM) in Electronic and Quantum Materials (Kurt A. Rubin, Yongliang Yang, Oskar Amster, David A. Scrymgeour, Shashank Misra)....Pages 385-408