ENGLISH

Microsystem Technology and Microrobotics

By Sergej Fatikow , Ulrich Rembold (auth.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
1997
ISBN
978-3-642-08232-0, 978-3-662-03450-7
DOI
10.1007/978-3-662-03450-7
Language
english
Format
PDF
Filesize
15 MB (16200432 bytes)
Edition
1
Pages
408\419
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Artificial Intelligence (incl. Robotics);ComplexitInstrumentation

Description

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.

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