ENGLISH

Semiconductor Manufacturing Technology

By Michael Quirk , Julian Serda

Book information

Publisher
Prentice Hall
Year
2000
ISBN
0130815209, 9780130815200
Open Library ID
OL15518930M
Language
english
Format
DJVU
Filesize
16 MB (16521778 bytes)
Edition
United States ed
Pages
510\510
DPI
300
Time added
2011-01-23 12:00:00
Приборостроение;Полупроводниковые приборы

Description

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.

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