ENGLISH

Etching of III-V semiconductors: an electrochemical approach

By Peter H.L. Notten , Jan E.A.M. Meerakker , John J. Kelly.

Book information

Publisher
Elsevier Advanced Technology
Year
1991
ISBN
0-946395-84-5
Language
english
Format
PDF
Filesize
108 MB (113286042 bytes)
Pages
363\363
DPI
600
Orientation
portrait
Paginated
yes
Scanned
yes
Time added
2016-03-14 21:35:01
Физика;Физика твердого тела;Физика полупроводников

Description

This research book reviews the important recent advances in the rapidly expanding III-V field. A complete reference that examines the fundamental aspects of different etching systems and their suitability in major application areas. Each system is classified according to mechanism and kinetics.

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