Physics and Technology of Semiconductor Devices
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New York: Wiley & Sons Inc., 1967. - 366 p. The purpose of this book is to provide an introduction to the physics and technology of planar silicon devices, i.e., devices made by the planar technology. To be sure, the physical principles underlying the fabrication and the operation of these devices do not differ from those underlying the fabrication and the operation of devices made from other semiconductors by other technologies. However, problems viewed in general terms tend to be very difficult to solve. To render a problem tractable, we must concentrate on its most important features. What is important for an alloy germanium diode, for instance, may not be important for a planar silicon diode. As a result, approximations which describe well the characteristics of the former often give results in very poor agreement with observations on the latter. Most if not all books in the past have tacitly concentrated on those factors that are important in relation to germanium alloy devices. In this one, the emphasis is on those which are important in dealing with planar silicon devices.
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