ENGLISH

Advanced Mechatronics and MEMS Devices

By Jörg Eichholz , Torgny Brogårdh (auth.) , Dan Zhang (eds.)

Book information

Publisher
Springer-Verlag New York
Year
2013
ISBN
978-1-4419-9984-9, 978-1-4419-9985-6
DOI
10.1007/978-1-4419-9985-6
Language
english
Format
PDF
Filesize
7 MB (7212902 bytes)
Series
Microsystems 23
Edition
1
Pages
252\255
Topic
Technique\\Automation
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Mechatronics; Biomedical EngineeringNanotechnology and Microengineering; ControlRobotics

Description

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.

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