ENGLISH

Laser-Assisted Microtechnology

By Professor Dr. Simeon M. Metev , Professor Dr. Vadim P. Veiko (auth.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
1998
ISBN
978-3-642-87273-0, 978-3-642-87271-6
DOI
10.1007/978-3-642-87271-6
Language
english
Format
PDF
Filesize
7 MB (7615942 bytes)
Series
Springer Series in Materials Science 19
Edition
2
Pages
270\282
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Materials Treatment;Surfaces and InterfacesNanotechnology;Operating ProceduresOptoelectronicsPlasmonics and Optical Devices;Characterization anThin Films;Optics

Description

Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.

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