ENGLISH

Kovacs. Micromachined Transducers. Sourcebook

By Gregory T.A.

Book information

Language
english
Format
DJVU
Filesize
20 MB (21269481 bytes)
Pages
\945
Library
twirpx
Time added
2017-08-07 07:01:42
Приборостроение;Микро- и наносистемная техника

Description

Designed for a graduate-level course in micromachineddevices, or as an introduction to the field for practicingengineers, this book presents an overview of the field,beginning with-micromachining approaches and includingall major categories of transduction. It examines thefabrication of individual devices through the study ofdesign issues and provides examples of key transducers,or structures, for comparison of performances obtainablethrough different approaches.

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