ENGLISH

Flash Lamp Annealing: From Basics to Applications

By Lars Rebohle , Slawomir Prucnal , Denise Reichel

Book information

Publisher
Springer International Publishing
Year
2019
ISBN
978-3-030-23298-6, 978-3-030-23299-3
Language
english
Format
PDF
Filesize
13 MB (13571251 bytes)
Series
Springer Series in Materials Science 288
Edition
1st ed. 2019
Pages
XVIII, 288\304
Time added
2020-02-08 04:41:20
LasersOptical Devices; MicrowavesPhotonicsPhysics; Semiconductors; Optical and Electronic MaRF and Optical Engineering; Nanotechnology and Mic

Description

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users. Front Matter ....Pages i-xviii Introduction (Lars Rebohle)....Pages 1-14 The Technology of Flash Lamp Annealing (Lars Rebohle)....Pages 15-70 Process Management (Lars Rebohle, Denise Reichel)....Pages 71-129 Semiconductor Applications (Slawomir Prucnal, Lars Rebohle, Denise Reichel)....Pages 131-232 Beyond Semiconductors (Slawomir Prucnal, Lars Rebohle, Denise Reichel)....Pages 233-282 Back Matter ....Pages 283-288

Similar books