Laser Heat-Mode Lithography: Principle and Methods

Description

This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size. Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc. Front Matter ....Pages i-xiii Current Status of Lithography (Jingsong Wei)....Pages 1-26 Principles of Laser Heat-Mode Lithography (Jingsong Wei)....Pages 27-47 High-Speed Rotation-Type Laser Heat-Mode Lithography System (Jingsong Wei)....Pages 49-79 Manipulation of Thermal Diffusion Channels (Jingsong Wei)....Pages 81-103 High-Speed Laser Heat-Mode Lithography on Chalcogenide Resists (Jingsong Wei)....Pages 105-121 Laser Heat-Mode Lithography Using Organic Thin Films (Jingsong Wei)....Pages 123-140 Laser Heat-Mode Lithography on Transparent Thin Films (Jingsong Wei)....Pages 141-167 Laser Heat-Mode Grayscale Lithography (Jingsong Wei)....Pages 169-189 Pattern Transfer for Laser Heat-Mode Lithography (Jingsong Wei)....Pages 191-208