ENGLISH

Microtransducer CAD: Physical and Computational Aspects

By Prof. Dr. Arokia Nathan , Prof. Dr. Henry Baltes (auth.)

Book information

Publisher
Springer-Verlag Wien
Year
1999
ISBN
978-3-7091-7321-3, 978-3-7091-6428-0
DOI
10.1007/978-3-7091-6428-0
Language
english
Format
PDF
Filesize
12 MB (12226926 bytes)
Series
Computational Microelectronics
Edition
1
Pages
427\444
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Electronics and MicroelectronicsInstrumentation; Nanotechnology; Optical and Elect

Description

Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic” effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

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