Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

Description

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects. Front Matter ....Pages i-xi Introduction to SiC and Thermoelectrical Properties (Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao)....Pages 1-9 Fundamentals of Thermoelectrical Effect in SiC (Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao)....Pages 11-41 Desirable Features for High-Temperature SiC Sensors (Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao)....Pages 43-53 Fabrication of SiC MEMS Sensors (Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao)....Pages 55-74 Impact of Design and Process on Performance of SiC Thermal Devices (Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao)....Pages 75-83 Applications of Thermoelectrical Effect in SiC (Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao)....Pages 85-106 Future Prospects of SiC Thermoelectrical Sensing Devices (Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao)....Pages 107-115