ENGLISH

Ulsi Technology

By C. Y. Chang , S. M. Sze

Book information

Publisher
McGraw-Hill Inc.,US
Year
1996
ISBN
0070630623, 9780070630628
Open Library ID
OL9901508M
Language
english
Format
DJVU
Filesize
7 MB (7522823 bytes)
Series
Mcgraw Hill Series in Electrical and Computer Engineering
Pages
751\751
DPI
300
Time added
2011-01-08 23:22:23
Приборостроение;Микро- и наносистемная техника

Description

This text follows the tradition of Sze's highly successful pioneering text on VLSI technology and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature process, rapid thermal processes, low damage plasma reactive ion etching, fine line litography, cleaning technology, clean room technology, packing and reliability.

Similar books