ENGLISH

Introduction to Micromechanisms and Microactuators

By Amitabha Ghosh , Burkhard Corves (auth.)

Book information

Publisher
Springer India
Year
2015
ISBN
978-81-322-2143-2, 978-81-322-2144-9
DOI
10.1007/978-81-322-2144-9
Language
english
Format
PDF
Filesize
9 MB (9573091 bytes)
Series
Mechanisms and Machine Science 28
Edition
1
Pages
161\169
Time added
2015-02-17 02:00:00
ControlDynamical SystemsMachinery and Machine Elements; Mechatronics; Nano

Description

This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.

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