Radio-Frequency Capacitive Discharges

Description

The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists Content: 1. Basic principles of the RF capacitive discharge -- 2. Moderate-pressure RF discharges -- 3. Low-pressure RF discharges and asymmetry effects -- 4. Experimental methods and measurements -- 5. Application of RF capacitive discharges for gas laser excitation and plasma technology.