Micromachined Circuits and Devices: Microwave to Sub-millimeter Applications (Lecture Notes in Electrical Engineering, 859)

Description

This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types.  The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phase shifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications. Preface Contents Abbreviations 1 Introduction to Radio Frequency Micro Electromechanical Systems 1.1 Overview of Micromachined Radio Frequency Components 1.2 Micromachined Passive Circuits 1.2.1 Transmission Line 1.2.2 Varactor and Inductors 1.2.3 Switches and Other Passive Circuits 1.2.4 Resonators 1.3 Fabrication of RF Micromachined Devices on Different Technology Platforms 1.4 Applications of RF Micromachined Devices and Components 1.5 Book Organisation References 2 Micromachined Microwave Passive Circuits 2.1 Introduction 2.2 Micromachined Conductor Backed Coplanar Waveguide (CBCPW) Lines 2.2.1 Studies on Basic Micromachined Transmission Structures 2.2.2 Design Data on Discontinuities in Membrane Microstrip 2.2.3 Design Data on Discontinuities in Membrane Coplanar Lines 2.2.4 Tee-Junction Discontinuity 2.3 Micromachined Varactors 2.3.1 Modelling and Design Optimization 2.3.2 Quality Factor Analysis 2.3.3 Electro-Mechanical Modelling of the Varactor with Parametric Optimization 2.3.4 Testing and Characterization of the Micromachined Varactor 2.4 Micromachined Inductors 2.5 Micromachined RF Power Divider and Coupler 2.6 Conclusions References 3 Micromachined Single-Pole-Single Throw Switches 3.1 Introduction 3.2 Ohmic Contact Micromachined Switch 3.2.1 Switch Profile Analysis 3.2.2 Mechanical Resonance Frequency 3.2.3 Electrical Responses 3.2.4 Switching and Release Time Responses 3.2.5 Radio Frequency Performance 3.2.6 Temperature Sensitivity 3.2.7 Radio Frequency Power Handling Performance 3.2.8 Intermodulation Distortion 3.3 Conclusions References 4 Micromachined Single-Pole-Multi-throw Switching Networks 4.1 Introduction 4.2 Vertical Actuation of Micromachined Switching Networks 4.2.1 Single-Pole-Three-Throw (SP3T) Switch Design and Measurement 4.2.2 Single-Pole-Six-Throw (SP6T) Switch Design and Measurements 4.2.3 Single-Pole-Seven-Throw (SP7T) Switch Design and Measurements 4.2.4 Single-Pole-Eight-Throw (SP8T) Switch Design and Measurements 4.2.5 Single-Pole-Ten-Throw (SP10T) Switch Design and Measurements 4.2.6 Single-Pole-Eleven-Throw (SP11T) Switch Design and Measurements 4.2.7 Single-Pole-Twelve-Throw (SP12T) Switch Design and Measurements 4.2.8 Single-Pole-Fourteen-Throw (SP14T) Switch Design and Measurements 4.2.9 Design Guidelines of the MEMS SPMT Switches 4.2.10 IIP3 Measurements of the Micromachined SPMT Switches 4.3 Design, Analysis and Measurements of Single-Pole-Sixteen-Throw Switch 4.3.1 SP16T Switch Design and Analysis 4.3.2 Measurements of the SP16T Switches 4.4 Lateral Actuation of Switching Networks 4.4.1 Design and Measurements of Single Lateral MEMS Switch 4.4.2 Design and Measurements of Different SPMT Lateral MEMS Switches 4.5 Phase-Change Materials (PCMs) Based Micromachined RF Switches 4.6 Conclusions References 5 Micromachined Resonators and Circuits 5.1 Introduction 5.2 Basic Resonator Model and Properties 5.3 Electromechanical Properties of MEMS Resonators 5.4 Circuit Model Representation of MEMS Resonators 5.4.1 Flexural Modes 5.4.2 Bulk Modes 5.4.3 Shear Modes 5.4.4 Torsional Modes 5.4.5 Coupled Resonators 5.5 Transduction Mechanism of Resonators 5.5.1 Capacitive Transduction Mechanism 5.5.2 Piezoelectric Transduction Mechanism 5.5.3 Piezoresistive Transduction Mechanism 5.6 Applications 5.6.1 Applications in Timing 5.6.2 MEMS Resonator-Based Oscillators 5.7 Conclusions References 6 Micromachined Phase Shifters 6.1 Introduction 6.2 Classification of Phase Shifters 6.2.1 Reflection Type Phase Shifter 6.2.2 Switched-Line Phase Shifter 6.2.3 Loaded-Line Phase Shifters 6.2.4 Low-Pass/High-Pass Network Phase Shifter 6.2.5 Distributed MEMS Transmission Line (DMTL) Phase Shifter 6.3 Conventional Micromachined Switched Line Phase Shifters 6.3.1 Digital MEMS 5-Bit Switched Line Phase Shifter Using Two Back-To-Back SPDT Switches 6.3.2 4-Bit Switched Line Phase Shifters Using Two Back-To-Back SP16T Switches 6.4 Different Types of DMTL Phase Shifters 6.4.1 Phase Shifters Using MAM Capacitors and MEMS Bridges 6.4.2 Push–Pull Type MEMS Digital DMTL Phase Shifters 6.5 Narrowband and Compact MEMS Phase Shifters 6.6 Reconfigurable MEMS Digital Phase Shifters 6.7 Wide-Band MEMS Digital Phase Shifters 6.8 Other State-of-The-Art Micromachined Phase Shifters 6.9 Conclusions References 7 Micromachined Tunable Filters Using MEMS Switches 7.1 Introduction 7.2 Design Topology of the Tunable Bandpass Filter and Its Working Principle 7.3 Design and Testing of Individual Functional Blocks of the Filter 7.3.1 MEMS Switch Design and Measurements 7.3.2 MEMS Shunt Switch Array Design and Measurements: Block 2 7.3.3 Design of Block 3 7.4 Testing of Tunable Bandpass Filter 7.5 Design Guidelines of the Proposed Filter and Future Scope for Improvements 7.6 Frequency and Bandwidth Tunable Micromachined Bandpass Filter at 24 GHz 7.7 Conclusions References 8 Reliability Analysis of RF MEMS Devices 8.1 Introduction 8.2 Testing the Reliability of RF MEMS Devices 8.3 Reliability Analysis on MEMS Switching Networks 8.4 Reliability Analysis on MEMS Digital Phase Shifter 8.5 Reliability Analysis on Tunable MEMS Filter 8.6 Conclusions References 9 Micromachined Antennas 9.1 Introduction 9.2 Micromachined Microstrip Patch Antennas 9.3 Micromachined Antennas for 60 GHz ISM Band 9.3.1 Micromachined Antennas for 60 GHz ISM Band Using High Isolation SPDT Switch 9.3.2 Micromachined Antennas for ISM Band Sectoring Applications Using a SP9T Switch 9.4 Polarization Agile MEMS Antenna at 77 GHz 9.5 Millimeter Wave Micromachined Active Antenna 9.5.1 Scaled Model (At K-band and on RT-duroid 10 Million Substrate) 9.5.2 Scaled Model at Ka-band and on RT-duroid 5 Million Substrate 9.6 Micromachined Two-Port Patch Antenna 9.7 Micromachined Active Antenna Element at Ka-band and on Silicon Substrate 9.8 Design Guidelines for Micromachined Patch Antenna with Air Cavity at 35 GHz 9.9 Conclusions References 10 Micromachined Metamaterial Inspired Switches 10.1 Introduction 10.2 Micromachined Switch Using Capacitive Contacts 10.2.1 Basic Layout of Capacitive Shunt Switch 10.2.2 Simulation Results 10.3 DGS Inspired Micromachined Switch 10.3.1 DGS Capacitive RF MEMS Switch 10.4 Metamaterial Inspired Micromachined Switch 10.4.1 Basic Switch Layout and Analysis 10.4.2 Shunt Switch with DGS Structures and Overlaid Secondary Switches 10.5 Casimir Repulsive Force Inspired Micromachined Switch 10.5.1 Concept of Casimir Effect 10.5.2 Application of Casimir Effect in RF MEMS Switches 10.6 Repulsive Casimir Force Inspired Resistive (Metal-to-Metal) Contact Micromachined Switch 10.7 Casimir Repulsive Force Inspired Capacitive Contact Micromachined Switch 10.8 Casimir Force Study 10.9 Conclusions References 11 Future Scope of RF MEMS in THz Regime 11.1 Introduction 11.2 Micromachined Metamaterial Based Devices in THz Regime 11.2.1 Micromachined Metamaterial Based Frequency Selective Surface at THz 11.2.2 Micromachined Metamaterial Based Absorbers at THz 11.3 2.5D-3D Micromachined Devices at Sub-Millimetre Wave 11.4 Conclusions References Appendix A Design Data on Micromachined Transmission Lines and Discontinuities Appendix B Details of Fabrication Process Index