ENGLISH

Microlithography: science and technology

By Smith , Kazuaki , Bruce W.; Suzuki

Book information

Publisher
CRC Press
Year
2020
ISBN
9781439876756, 9781315117171, 1315117177, 9781351633949, 1351633945, 9781351643443, 1351643444, 9781439876763, 1439876762
Language
english
Format
PDF
Filesize
33 MB (35123897 bytes)
Edition
Third edition
Pages
\979
Time added
2020-10-11 07:48:25
Complementary -- Design and constructionComplementary--Design and construction;MicrolithogIntegrated circuits--Masks;Manufacturing processes

Description

"Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices"--

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