Semiconductor Safety Handbook. Safety and Health in the Semiconductor Industry

Description

Content: About the Editor, Page iiPreface, Pages vi-xi, Richard A. Bolmen Jr.Contributors, Pages xii-xiii1 - Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies, Pages 25-58, Donald V. Lassiter, James H. Stewart2 - Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention, Pages 59-93, Robert G. Kuykendall, Rollin C. ChewAppendix A - EPA policy on environmental auditing, Pages 94-101Appendix B - Environmental Compliance Audit Checklist, Pages 102-153Appendix C, Pages 154-1863 - Chemical Hazards in Semiconductor Operations, Pages 187-203, Thomas E. Hawkinson, Daryl B. Korpela4 - Industrial Hygiene, Pages 204-268, David G. Baldwin, Michael E. Williams5 - Electrical Hazards, Pages 269-303, Clifford E. Oliver6 - Radiation Safety, Pages 304-326, David G. Baldwin, Michael E. Williams7 - Recognition, Evaluation and Control of Some Plasma Processing Hazards, Pages 327-377, David Rainer, Lisa Brooks8 - Fire Protection Technology for Semiconductor Operations, Pages 378-428, Robert J. Pearce9 - Building and Fire Codes Impacting the Semiconductor Industry, Pages 429-471, William R. Acorn10 - Gases and Gas Equipment, Pages 472-580, Richard P. Brookman, Bruce Tibbott11 - Toxic Gas Monitoring, Pages 581-615, Paul C. ManzIndex, Pages 616-634