ENGLISH

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

By Evgeni Gusev , Eric Garfunkel , L C Feldman , E. P. Gusev , E. Garfunkel (auth.) , Alexander Vul’ (eds.)

Book information

Publisher
Springer Netherlands
Year
1998
ISBN
978-0-7923-5008-8, 978-94-011-5008-8
DOI
10.1007/978-94-011-5008-8
Language
english
Format
PDF
Filesize
40 MB (42109700 bytes)
Series
NATO Science Series 47
Edition
1
Pages
507\502
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Optical and Electronic Materials; Surfaces and IntThin Films

Description

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of

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