ENGLISH

Fundamentals of nanoscale film analysis

By Mayer J.W. , Alford T.L. , Feldman L.C.

Book information

Publisher
Springer
Year
2007
ISBN
0387292608, 9780387292601
Open Library ID
OL7445160M
Language
english
Format
PDF
Filesize
4 MB (3882559 bytes)
Pages
349\349
Library
Kolxo3
Time added
2011-07-22 07:35:22

Description

From materials science to integrated circuit development, much of modern technology is moving from the microscale toward the nanoscale. This book focuses on the fundamental physics underlying innovative techniques for analyzing surfaces and near-surfaces. New analytical techniques have emerged to meet these technological requirements, all based on a few processes that govern the interactions of particles and radiation with matter. This book addresses the fundamentals and application of these processes, from thin films to field effect transistors.

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