ENGLISH

CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications

By Dr. D. Lange , Dr. O. Brand , Professor Dr. H. Baltes (auth.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
2002
ISBN
978-3-642-07728-9, 978-3-662-05060-6
DOI
10.1007/978-3-662-05060-6
Language
english
Format
PDF
Filesize
5 MB (5278083 bytes)
Series
Microtechnology and Mems
Edition
1
Pages
142\147
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
general;Measurement Science and InstrumentationMechatronics;EngineeringNanotechnology;ControlRobotics

Description

This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.

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