ENGLISH

Handbook of Vacuum Science and Technology

By Dorothy Hoffman , Bawa Singh , John H. Thomas III

Book information

Publisher
Academic Press
Year
1997
ISBN
9780123520654, 0123520657
LCC
TJ940 .H59 1998
Open Library ID
OL679752M
Language
english
Format
PDF
Filesize
46 MB (48378883 bytes)
Edition
1st
Pages
829\829
Library
duansci.com
Time added
2010-06-26 00:49:36

Description

I did a little research before I bought this book. It turns out that it paid off - this is a great book for vacuum technology. As a designer of UHV semiconductor equipment, I would highly recommend this text. I bought one more book on the subject at the same time - this one is the better overall choice for complete coverage. I am still looking for a reference that has tips and trick of the trade - but there is enough info in this book to point you in the right direction.

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