ENGLISH

Run-to-Run Control in Semiconductor Manufacturing

By Enrique del Castillo , James Moyne , Arnon M. Hurwitz

Book information

Publisher
CRC Press
Year
2000
ISBN
0849311780, 9780849311789
Open Library ID
OL17013896M
Language
english
Format
PDF
Filesize
9 MB (9212114 bytes)
Edition
1
Pages
341\341
Time added
2011-08-31 04:54:40

Description

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

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