ENGLISH

Fast Simulation of Electro-Thermal MEMS: Efficient Dynamic Compact Models

By Dr. Tamara Bechtold , Dr. Evgenii B. Rudnyi , Professor Dr. Jan G. Korvink (auth.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
2007
ISBN
978-3-540-34612-8, 978-3-540-34613-5
DOI
10.1007/978-3-540-34613-5
Language
english
Format
PDF
Filesize
5 MB (5083844 bytes)
Edition
1
Pages
180\184
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Circuits and Systems;Electronics and MicroelectronInstrumentation;Physics and Applied Physics in Eng

Description

Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.

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