ENGLISH

Outlook and Challenges of Nano Devices, Sensors, and MEMS

Book information

Publisher
Springer International Publishing
Year
2017
ISBN
978-3-319-50822-1, 978-3-319-50824-5
DOI
10.1007/978-3-319-50824-5
Language
english
Format
PDF
Filesize
28 MB (29338791 bytes)
Edition
1
Pages
XVI, 521\522
Time added
2017-04-19 23:42:45

Description

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.

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