ENGLISH

Nano Lithography

By Landis S.

Book information

Language
english
Format
PDF
Filesize
19 MB (19617162 bytes)
Pages
\346
Library
twirpx
Time added
2017-08-07 07:01:42
Специальные дисциплины;Наноматериалы и нанотехноло

Description

ISTE Ltd and John Wiley & Sons, Inc., 2011. — 320 p. — ISBN: 1848212119. На англ. языке.Nanolithography is the branch of nanotechnology concerned with the study and application of fabricating nanometer-scale structures − meaning the creation of patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. It is used in the fabrication of leading-edge semiconductor integrated circuits (nanocircuitry) or nanoelectromechanical systems (NEMS).This book addresses physical principles as well as the scientific and technical challenges of nanolithography, covering X-ray and NanoImprint lithography, as well as techniques using scanning probe microscopy and the optical properties of metal nanostructures, patterning with block copolymers, and metrology for lithography. It is written for engineers or researchers new to the field, and will help readers to expand their knowledge of technologies that are constantly evolving.

Similar books