ENGLISH

Plasma Chemistry III

By John Coburn , Eric Kay , Alan Dilks (auth.) , Dr. Stanislav Vepřek , Prof. Dr. Mundiyath Venugopalan (eds.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
1980
ISBN
9783540101666, 9783540382645
Language
english
Format
PDF
Filesize
2 MB (2237231 bytes)
Series
Topics in Current Chemistry 94
Edition
1
Pages
132\133
Time added
2020-08-30 06:11:09
Physical Chemistry

Description

Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization....Pages 1-42 The Mechanism and kinetics of plasma polymerization....Pages 43-68 Elementary processes at solid surfaces immersed in low pressure plasmas....Pages 69-125

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