Optical Metrology for Precision Engineering

Description

This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way Preface Contents Chapter 1 Laser autocollimator Chapter 2 Three-axis angle sensor Chapter 3 Surface encoder Chapter 4 Mosaic encoder Chapter 5 In-line and on-machine surface profiler Chapter 6 Fabrication and calibration of scale grating Chapter 7 Ultrashort-pulse angle sensor Chapter 8 Optical frequency comb Chapter 9 Angle comb Chapter 10 Chromatic confocal comb Chapter 11 Position comb Chapter 12 Optical comb applied metrology Index