ENGLISH

Spectroscopic Ellipsometry and Reflectometry: A User's Guide

By Tompkins , McGahan

Book information

Publisher
John Wiley & Sons
Year
1999
ISBN
0471181722, 9780471181729
Language
english
Format
PDF
Filesize
94 MB (98923631 bytes)
Edition
1
Pages
248\237
Time added
2021-08-06 12:04:44

Description

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

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