ENGLISH

Foundations of MEMS

By Liu , Chang

Book information

Publisher
Pearson; Prentice Hall
ISBN
9780132497367, 0273752243, 9780273752240, 0132497360
Language
english
Format
PDF
Filesize
6 MB (6024329 bytes)
Edition
2a ed
Pages
562\577
Time added
2020-11-29 04:29:59

Description

For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMSis an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology -- all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

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