ENGLISH

Radiation Effects in Advanced Semiconductor Materials and Devices

By Prof. Cor Claeys , Dr. Eddy Simoen (auth.)

Book information

Publisher
Springer-Verlag Berlin Heidelberg
Year
2002
ISBN
978-3-642-07778-4, 978-3-662-04974-7
DOI
10.1007/978-3-662-04974-7
Language
english
Format
PDF
Filesize
18 MB (18590895 bytes)
Series
Springer Series in Materials Science 57
Edition
1
Pages
404\424
Time added
2014-01-18 08:00:00
Crystallography; Characterization and Evaluation oInstrumentationThin Films; Electronics and Microelectronics

Description

In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments.

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