ENGLISH

Plasma Processing for VLSI

By Norman G. Einspruch

Book information

Publisher
Academic Pr
Year
1984
ISBN
0122341082, 9780122341083
ISSN
0736-7031
LCC
TK7874 .V56 vol. 8
Open Library ID
OL3179753M
Language
english
Format
DJVU
Filesize
6 MB (6635146 bytes)
Series
Vlsi Electronics Microstructure Science 8
Edition
1st
Pages
536\536
DPI
300
Time added
2011-01-23 12:00:00
Физика;Физика плазмы

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