ENGLISH

Semiconductor Materials and Process Technology Handbook

By McGuire , G.E.(eds.)

Book information

Publisher
William Andrew Publishing/Noyes
Year
1988
ISBN
978-0-8155-1898-3, 978-0-8155-1150-2
Language
english
Format
PDF
Filesize
18 MB (18962963 bytes)
Pages
687\326
Orientation
yes
Scanned
landscape
Time added
2013-08-14 18:00:00

Description

This handbook is a broad review of semiconductor materials and process technology, with emphasis on very-large-scale integration (VLSI) and ultra-large-scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

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