ENGLISH

Handbook of Semiconductor Wafer Cleaning Technology

By Werner Kern

Book information

Publisher
William Andrew
Year
1994
ISBN
9780815513315, 0815513313
LCC
TK7871.85 .H335 1993
Open Library ID
OL1396639M
Language
english
Format
PDF
Filesize
35 MB (36363656 bytes)
Series
Materials Science and Process Technology Series
Pages
634\634
Library
mexmat
Time added
2009-11-09 02:42:13
каталогиПриборостроение;Полупроводниковые приборы;Справочнтаблицы

Description

This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co

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