ENGLISH

Dielectric films for advanced microelectronics

By Mikhail Baklanov , Karen Maex , Martin Green

Book information

Publisher
John Wiley & Sons
Year
2007
ISBN
9780470013601, 0470013605
LCC
TK7871.15.F5 D54 2007
Open Library ID
OL17999977M
Language
english
Format
PDF
Filesize
10 MB (10644093 bytes)
Series
Wiley series in materials for electronic and optoelectronic applications
Pages
510\510
Library
Kingdwarf
Time added
2010-01-07 06:59:20
Физика;Физика твердого тела;Физика диэлектриков

Description

The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.

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