ENGLISH

High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

By Jon Orloff , Mark Utlaut , Lynwood Swanson (auth.)

Book information

Publisher
Springer US
Year
2003
ISBN
978-1-4613-5229-7, 978-1-4615-0765-9
DOI
10.1007/978-1-4615-0765-9
Language
english
Format
PDF
Filesize
24 MB (25648698 bytes)
Edition
1
Pages
304\303
Orientation
yes
Scanned
yes
Time added
2013-08-01 04:00:00
Characterization and Evaluation of Materials;Physigeneral;Optical and Electronic Materials;OpticsOptoelectronicsPlasmonics and Optical Devices

Description

In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.

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