ENGLISH

Optical scattering : measurement and analysis

By John C. Stover

Book information

Publisher
SPIE Optical Engineering Press
Year
1995
ISBN
0-8194-1934-6, 9780819419347, 9780819478443, 081947844X, 9781615837397, 1615837396
Language
english
Format
PDF
Filesize
20 MB (21235612 bytes)
Series
SPIE Press Monograph Vol. PM24
Edition
Second
Pages
321\326
Time added
2016-01-24 03:00:00
Light -- Scattering. Lumière -- Diffusion.

Description

As the authoritative resource on optical scattering, this book was developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. Dr. Stover covers scattering beginning with its basics and covering surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. Also included are appendices that review the basics of wave propagation and Kirchhoff diffraction. Whether you're an optical engineer currently investigating roughness-induced haze in the semiconductor industry, or just entering the field of scatter metrology, this text will be invaluable. �Read more... Abstract: Focusing on optical scattering, this book is developed from many years of teaching light-scatter measurement and analysis courses to optical engineers. It covers scattering beginning with its basics and surface roughness calculations, measurements, instrumentation, predictions, specifications, and industrial applications. �Read more...

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