Materials Science of Thin Films. Deposition and Structure

Description

"There is a need for new, comprehensive texts and references in [advanced materials processing] and its subdisciplines. This has been especially true for thin films, and of the several recent books on the subject, Milton Ohring's extensive volume is without a doubt the best." Praise for the First Edition , --NATURE "Ohring's very timely and excellent book fills a long-existing need in materials education at the graduate level....The book is very well written, presented, and illustrated. It will prove useful to the scientist or engineer in coatings, to the college senior working on a project, and especially to graduate students in materials science and engineering and to faculty involved in teaching or research in the area of thin films. An excellent acquisition for an academic library." --CHOICE "The author writes in a fluent and engaging style which the student should have little trouble in understanding. His examples and technical insights do a great deal to make his text readable..." --R.J. BORG "The combination of teaching, research, and industrial involvement has provide Profesor Ohring with a broad perspective of thin film science and technoloy and tremendous insight into the needs of students entering this exciting field. His insight and experience are quite evident in this textbook." --JOHN L. VOSSEN, John Vossen Associates, Inc. "The text is easy to read, technically correct, unfolds in a logical manner, and includes a large number of important features related to thin films. I congratulate the author for proposing a thoughtful treatment of this increasingly popular subject." --CHARLES L. BAUER, Carnegie Mellon University "Professor Milt Ohring has a long and unique perspective of thin film science from his dealings with academia and industry. This book represents his accumulated experiences of teaching and research. Thin film science is at the heart of many of our most advanced technologies. This book should prove invaluable not only to the university student but also to the professional who needs a broad overview of this important field." --J.M. POATE, AT&T Bell LaboratoriesContent: Foreword to first edition, Page xiPreface, Pages xiii-xvAcknowledgments, Pages xvii-xviiiHistorical perspective, Pages xix-xxiChapter 1 - A review of materials science, Pages 1-56Chapter 2 - Vacuum science and technology, Pages 57-93Chapter 3 - Thin-film evaporation processes, Pages 95-144Chapter 4 - Discharges, plasmas, and ion-surface interactions, Pages 145-202Chapter 5 - Plasma and ion beam processing of thin films, Pages 203-275Chapter 6 - Chemical vapor deposition, Pages 277-355Chapter 7 - Substrate surfaces and thin-film nucleation, Pages 357-415Chapter 8 - Epitaxy, Pages 417-494Chapter 9 - Film structure, Pages 495-558Chapter 10 - Characterization of thin films and surfaces, Pages 559-640Chapter 11 - Interdiffusion, reactions, and transformations in thin films, Pages 641-710Chapter 12 - Mechanical properties of thin films, Pages 711-781Appendix, Page 782Index, Pages 783-794