ENGLISH

Plasma-Aided Nanofabrication: From Plasma Sources to Nanoassembly

Book information

Publisher
Wiley-VCH
Year
2007
ISBN
3527294430, 3527298363, 3527298371, 3527305076
LCC
QC176.8.N35 N354 2004
Open Library ID
OL21706151M
Language
english
Format
PDF
Filesize
8 MB (8019687 bytes)
Pages
316\316
Library
mexmat
Time added
2009-07-20 03:45:11

Description

In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.

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