ENGLISH

Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions

By Stephen M. Rossnagel , William D. Westwood , Jerome J. Haber

Book information

Publisher
Noyes Publications
Year
1990
ISBN
0815512201, 9780815512202, 9780815517634
LCC
TA2020 .H37 1990
Open Library ID
OL2201184M
Language
english
Format
DJVU
Filesize
5 MB (5224391 bytes)
Series
Materials science and process technology series
Pages
535\535
Library
Kolxo3
DPI
300
Time added
2009-07-20 03:45:11
Физика;Физика плазмы

Description

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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