ENGLISH

Nanofabrication : principles to laboratory practice

By Andrew , Sarangan

Book information

Publisher
CRC Press
Year
2017
ISBN
9781498725590, 978-1-4987-2557-6, 9781315370514, 1315370514
Language
english
Format
PDF
Filesize
41 MB (42540923 bytes)
Series
Optical sciences and applications of light
Pages
\316
Time added
2018-04-04 20:00:00
Nanolithography.;Nanostructured materials -- Desig

Description

Content: Chapter 1. Introduction to micro- and nanofabrication -- Chapter 2. Fundamentals of vacuum and plasma technology -- Chapter 3. Physical and chemical vapor deposition -- Chapter 4. Thin-film optics -- Chapter 5. Substrate materials -- Chapter 6. Lithography -- Chapter 7. Wet chemical and plasma etching -- Chapter 8. Doping, surface modifications, and metal contacts -- Chapter 9. Metrology for device fabrication.

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