CMOS Nanoelectronics: Innovative Devices, Architectures, and Applications

By Nadine Collaert (Editor)

Book information

Publisher
Jenny Stanford Publishing
Year
2012
ISBN
9789814364027, 9789814364034, 9780429112836
DOI
10.1201/b13063
Format
PDF
Filesize
17 MB (17677043 bytes)
Edition
1
Pages
\444
Time added
2020-10-06 04:24:42
Bioscience;Biotechnology;Engineering & Technology;

Description

This book covers one of the most important device architectures that have been widely researched to extend the transistor scaling: FinFET. Starting with theory, the book discusses the advantages and the integration challenges of this device architecture. It addresses in detail the topics such as high-density fin patterning, gate stack design, and s

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