Ion Implantation: Equipment and Techniques: Proceedings of the Fourth International Conference Berchtesgaden, Fed. Rep. of Germany, September 13–17, 1982

Book information

Publisher

Springer-Verlag Berlin Heidelberg

Year

1983

ISBN

978-3-642-69158-4, 978-3-642-69156-0

DOI

10.1007/978-3-642-69156-0

Language

english

Format

PDF

Filesize

16 MB (16465148 bytes)

Series

Springer Series in Electrophysics 11

Edition

1

Pages

558\563

Topic

Physics › Plasma Physics

Orientation

yes

Scanned

yes

Time added

2013-08-01 04:00:00