ENGLISH

Plasma processing for VLSI

By Norman G Einspruch; Dale M Brown

Book information

Publisher
Academic Press
Year
1984
ISBN
0-12-234108-2, 978-0-12-234108-3
ISSN
0736-7031
Language
english
Format
PDF
Filesize
60 MB (63303072 bytes)
Series
VLSI Electronics Microstructure Science 8
Edition
1st
Pages
xiv, 527 pages : ill ; 24 cm\523
Time added
2014-11-04 21:00:00
Физика;Физика плазмы

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