Vacuum : Science, Technology and Applications

Description

"Vacuum plays an important role in science and technology. The study of interaction of charged particles, neutrals and radiation with each other and with solid surfaces requires a vacuum environment for reliable investigations. Vacuum has contributed immensely to advancements made in nuclear science, space, metallurgy, electrical/electronic technology, chemical engineering, transportation, robotics and many other fields. This book is intended to assist students, scientists, technicians and engineers to understand the basics of vacuum science and technology for application in their projects. The fundamental theories, concepts, devices, applications, and key inventions are discussed. "--Provided by publisher. Read more... Abstract: "Vacuum plays an important role in science and technology. The study of interaction of charged particles, neutrals and radiation with each other and with solid surfaces requires a vacuum environment for reliable investigations. Vacuum has contributed immensely to advancements made in nuclear science, space, metallurgy, electrical/electronic technology, chemical engineering, transportation, robotics and many other fields. This book is intended to assist students, scientists, technicians and engineers to understand the basics of vacuum science and technology for application in their projects. The fundamental theories, concepts, devices, applications, and key inventions are discussed. "--Provided by publisher Content: Intro Halftitle Page Title Page Copyright Table of Contents About the Author Preface and Acknowledgements Introduction 1 Kinetic Theory of Gases 1.1 Basic Concepts 1.1.1 Pressure 1.1.2 Equation of State 1.1.3 Gas Density 1.1.4 Avogadro's Law 1.1.5 Molecular Motion and Energy 1.1.6 Molecular Impingement Rate 1.1.7 Mean Free Path 1.1.8 Heat Transfer 1.1.8.1 Heat Transfer by Radiation 1.1.8.2 Heat Transfer by Conduction at Low Pressure 1.1.8.3 Convection 1.1.9 Thermal Transpiration 2 Flow of Gas and Conductance 2.1 Types of Gas Flow 2.1.1 Viscous Flow 2.1.2 Molecular Flow2.2 Conductance 2.2.1 Conductance of an Orifice in Molecular Flow Region 2.2.2 Conductance in the Viscous Flow Region Conductance of an Orifice 2.2.3 Conductance in the Transition Flow Region 2.3 Basic Pumping Equation 2.4 Standard Leaks 2.5 Rise of Pressure in a Sealed-off Vacuum Device 3 Surface Phenomena 3.1 Neutrals-Surface Interactions 3.1.1 Diffusion of Gases 3.1.2 Permeation 3.1.3 Physical and Chemical Adsorption 3.1.3.1 Monolayer 3.1.3.2 Sticking probability 3.1.3.3 Adsorption Isotherms and Surface Area 3.1.4 Desorption 3.1.4.1 Determination of Activated Energy of Desorption3.1.4.2 Photon-Electron and Ion-Induced Desorption 3.1.5 Thin Films Deposition on Surfaces 3.1.6 Molecular Beam Epitaxy (MBE) 3.1.7 Surface Ionization 3.2 Interaction of Charged Particles, Radiation and Heat with Solid Surfaces 3.2.1 Ion-Surface Interactions 3.2.1.1 Scattering of Positive Ions 3.2.1.2 Secondary Electron Emission by Ion Surface Interaction 3.2.1.3 Entrapment of Injected Ions 3.2.1.4 Sputtering 3.2.1.5 Ion Beam Implantation 3.2.1.6 Ion Beam Deposition/Ion Plating 3.2.2 Electron-surface interactions 3.2.2.1 Secondary Electron Emission by Electrons3.2.2.2 Auger Electron Emission 3.2.2.3 X-ray Emission 3.2.2.4 Interaction of High-Energy Electrons with Surface 3.2.3 Photon-surface interactions 3.2.3.1 Photoelectric Emission 3.2.3.2 X-Ray Photoelectron Emission 3.2.4 Electric Field-Surface Interaction 3.2.4.1 Field Emission 3.2.5 Thermionic Emission 3.2.6 Emission From Contact Surfaces in Vacuum Arcs 3.2.7 Evaporation−Sublimation−Vapour Pressure 3.2.8 Vacuum Evaporation 4 Interaction of Neutrals, Charged Particles and Radiation with Gases in Vacuum 4.1 Disassociation, Excitation and Ionization4.1.1 Mean Free Path of Electrons and Ions 4.1.2 Ionization Potential and Ionization Efficiency/Cross Section 4.1.3 Positive Ion-Impact Ionization 4.1.4 Ionization by Photons and Thermal Ionization 4.1.5 Deionization 4.2 Electrical Breakdown in Vacuum 4.2.1 Gas Breakdown 4.2.2 Glow Discharge 4.2.3 Vacuum Breakdown 4.3 Plasma 5 Measurement of Pressure 5.1 Mechanical Gauges 5.1.1 Manometers 5.1.2 McLeod Gauge 5.1.3 Diaphragm gauges 5.1.4 Knudsen Gauge 5.1.5 Bourdon Gauge 5.2 Thermal Conductivity-based Gauges 5.3 Ionization Gauges