Optical Characterization of Thin Solid Films

Description

This book is an up-to-date survey of the major optical characterization techniques for thin solid films. Emphasis is placed on practicability of the various approaches. Relevant fundamentals are briefly reviewed before demonstrating the application of these techniques to practically relevant research and development topics. The book is written by international top experts, all of whom are involved in industrial research and development projects. Front Matter ....Pages i-xxiv Front Matter ....Pages 1-1 Introduction (O. Stenzel, Miloslav Ohlídal)....Pages 3-10 Characterization of Porous Zirconia Samples as an Example of the Interplay Between Optical and Non-optical Characterization Methods (O. Stenzel)....Pages 11-29 Universal Dispersion Model for Characterization of Thin Films Over Wide Spectral Range (Daniel Franta, Jiří Vohánka, Martin Čermák)....Pages 31-82 Predicting Optical Properties from Ab Initio Calculations (Pavel Ondračka, David Holec, Lenka Zajíčková)....Pages 83-104 Front Matter ....Pages 105-105 Optical Characterization of Thin Films by Means of Imaging Spectroscopic Reflectometry (Miloslav Ohlídal, Jiří Vodák, David Nečas)....Pages 107-141 Data Processing Methods for Imaging Spectrophotometry (David Nečas)....Pages 143-175 In Situ and Ex Situ Spectrophotometric Characterization of Single- and Multilayer-Coatings I: Basics (Olaf Stenzel, Steffen Wilbrandt)....Pages 177-202 In Situ and Ex Situ Spectrophotometric Characterization of Single- and Multilayer-Coatings II: Experimental Technique and Application Examples (Steffen Wilbrandt, Olaf Stenzel)....Pages 203-232 Ellipsometry of Layered Systems (Ivan Ohlídal, Jiří Vohánka, Martin Čermák, Daniel Franta)....Pages 233-267 Front Matter ....Pages 269-269 Optical Characterization of Thin Films Exhibiting Defects (Ivan Ohlídal, Martin Čermák, Jiří Vohánka)....Pages 271-313 Scanning Probe Microscopy Characterization of Optical Thin Films (Petr Klapetek)....Pages 315-339 Resonant Waveguide Grating Structures (Stefanie Kroker, Thomas Siefke)....Pages 341-358 Polarization Control by Deep Ultra Violet Wire Grid Polarizers (Thomas Siefke, Stefanie Kroker)....Pages 359-374 Front Matter ....Pages 375-375 Roughness and Scatter in Optical Coatings (M. Trost, S. Schröder)....Pages 377-405 Absorption and Fluorescence Measurements in Optical Coatings (Christian Mühlig)....Pages 407-431 Cavity Ring-Down Technique for Optical Coating Characterization (Christian Karras)....Pages 433-456 Back Matter ....Pages 457-462